Determination of Mg, Ti, Ni and Zn in semiconductor silicon by deuteron activation analysis

  • M. L. Boettger
  • D. Birnstein
  • S. Niese


Mg, Ti, Ni and Zn have been determined in semiconductor silicon by deuteron activation analysis using radiochemical separation and coincidence spectrometric methods. Detection limits under the experimental conditions are 15, 3, 0.7, and 14 ppb, respectively.


Silicon Physical Chemistry Inorganic Chemistry Detection Limit Activation Analysis 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    H. ROMMEL, Anal. Chim. Acta, 34 (1966) 427.Google Scholar
  2. 2.
    K. KROGNER, W. HELBIG, S. NIESE, Isotopenpraxis, 8 (1975) 278.Google Scholar
  3. 4.
    M. L. BOETTGER, D. BIRNSTEIN, W. HELBIG, J. Radioanal. Chem., 58 (1980) 183.Google Scholar
  4. 4.
    N. BARRANDON, J. L. DEBRUN, A. KOHN, J. Radioanal. Chem., 16 (1973) 617.Google Scholar
  5. 5.
    J. L. DEBRUN, J. N. BARANDON, P. BENABEN, Anal. Chem., 48 (1976) 167.Google Scholar
  6. 6.
    J. N. BARANDON, P. BENABEN, J. L. DEBRUN, Anal. Chim. Acta, 83 (1976) 157.Google Scholar
  7. 7.
    R. LACROIX, G. BLONDIAUX, A. GIAVAGNOLI, M. VALLADON, J. L. DEBRUN, R. COQUILLE, M. GAUNEAU, Proc. 3. Tagung Nukleare Analysenverfahren, Dresden, 1983. Report ZfK-524 (1984) p. 34.Google Scholar
  8. 8.
    C. S. SASTRI, H. PETRI, G. ERDTMANN, Anal. Chem., 49 (1977) 51.Google Scholar
  9. 9.
    Ch. ENGELMANN, IAEA-SM-170/66.Google Scholar
  10. 10.
    M. L. BOETTGER, D. BIRNSTEIN, S. NIESE, Proc. 3. Tagung Nukleare Analysenverfahren Dresden 1983, Report ZfK-524, 1984, p. 38.Google Scholar
  11. 11.
    S. NIESE, W. GOERNER, H. KLEEBERG, Nucl. Instr. Methods, 118 (1974) 217.Google Scholar
  12. 12.
    S. NIESE, D. BIRNSTEIN, J. Radioanal. Nucl. Chem., in press.Google Scholar
  13. 13.
    H. F. ROEHM, C. VERWEY, J. STEYN, W. L. RAUTENBACH, J. Inorg. Nucl. Chem., 31 (1969) 3345; 32 (1970) 1431.Google Scholar
  14. 14.
    C. H. LASSUS-St. GENIES, J. TOBAILEM, CEA-N-1466 (2).Google Scholar
  15. 15.
    R. E. BATZEL, W. W. T. CRANE, C. D. O'KELLEY, Phys. Rev., 91 (1953) 939.Google Scholar
  16. 16.
    S. NIESE, W. HELBIG, J. Radioanal. Nucl. Chem., 100 (1986) 155.Google Scholar

Copyright information

© Akadémiai Kiadó 1988

Authors and Affiliations

  • M. L. Boettger
    • 1
  • D. Birnstein
    • 1
  • S. Niese
    • 1
  1. 1.Central Institute of NuclearAcademy of Sciences of the G. D. R.Dresden(GDR)

Personalised recommendations