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Comparison of methods for the determination of ultra-trace amounts of arsenic in high-purity trichlorosilane by NAA and AAS

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Abstract

Neutron activation analysis has been applied to the determination of ultra-trace amounts of arsenic based on the substoichiometric extraction of As(III) with thionalide. The arsenic content in high-purity trichlorosilane or silicon can be determined by the proposed method down to sub-ppb range with a very good reproducibility. Also, the data obtained were compared with results from atomic absorption spectrophotometry.

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  1. Institute of Nuclear Energy Research, Atomic Energy Council, P.O. Box 3-19, 325, Lung-Tan, Taiwan (Republic of China)

    S. G. Chen

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  1. S. G. Chen
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Chen, S.G. Comparison of methods for the determination of ultra-trace amounts of arsenic in high-purity trichlorosilane by NAA and AAS. Journal of Radioanalytical and Nuclear Chemistry, Articles 91, 107–114 (1985). https://doi.org/10.1007/BF02036315

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  • DOI: https://doi.org/10.1007/BF02036315

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