Abstract
Drilling of small holes into media containing O-H or C-H bonds with a 2.92μm YAIO3-Er laser is studied. In materials containing O-H bonds strong absorption allows small volumina to be heated with only marginal heat diffusion. Drilling with nearly diffraction-limited lateral resolution is achieved.
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Frauchiger, J., Lüthy, W. Interaction of 3μm radiation with matter. Opt Quant Electron 19, 231–236 (1987). https://doi.org/10.1007/BF02032517
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DOI: https://doi.org/10.1007/BF02032517