Journal of thermal analysis

, Volume 49, Issue 2, pp 589–594 | Cite as

Thermal decomposition of poly(α,α,α′,α′-tetrafluoro-p-xylylene) in nitrogen and oxygen

  • Kathryn R. Williams
Organic Compounds


The thermal decomposition of poly(α,α,α′,α′-tetrafluoro-p-xylylene) (parylene AF-4) films with thicknesses of ca. 7.5 and 10 μm has been studied by both dynamic (10°C min−1) and isothermal TG in either nitrogen or oxygen atmospheres.

In dynamic studies with nitrogen, gross decomposition occurs between 546.7±1.4 and 589.0±2.6°C, with 26.8±4.4% of the initial mass remaining at 700°C. With oxygen as the purge gas, the onset of decomposition shifts slightly to 530.8±4.2°C. The end of the transition at 587.4±2.6°C is within experimental error of the nitrogen value, but no polymer remains above 600°C.

Isothermal data were obtained at 10°C intervals from 420 to 490°C in nitrogen, and from 390 to 450°C in oxygen. Plots of log(Δ%wt/Δt)vs. T−1 are linear throughout the specified range for oxygen and from 420 to 470°C for nitrogen. The calculated activation energies of (147±16) kJ mol−1 and (150±12) kJ mol−1 in N2 and O2, respectively, are equal within experimental error.


decomposition parylene poly(α,α,α′α′-tetrafluoro-p-xylylene) TG 


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Copyright information

© Akadémiai Kiadó 1997

Authors and Affiliations

  • Kathryn R. Williams
    • 1
  1. 1.Department of ChemistryUniversity of FloridaGainesvilleUSA

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