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Microhardness of thin TiN y coatings deposited by a circular planar magnetron

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Czechoslovak Journal of Physics B Aims and scope

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References

  1. Chevallier J., Chabert J. P., Spitz J.:in Proc. 3rd Int. Conf. on Ion and Plasma Assisted Techniques, Amsterdam, 1981.

  2. Pearson W. B.: A Handbook of Lattice Spacings and Structures of Metals and Alloys, vol. 2, Pergamon Press, London 1967.

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  3. Beresnev V. M. et al.: Elektronnaya obrabotka materialov, no. 3, 1979, 30.

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Authors and Affiliations

  1. Institute of Plasma Physics, Czechosl. Acad. Sci., Pod vodárenskou věží 4, 182 11, Praha 8, Czechoslovakia

    J. Musil & L. Bárdoš

  2. Central Research Institute Škoda Plzeň, 316 00, Plzeň, Czechoslovakia

    J. Václav

Authors
  1. J. Musil
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  2. L. Bárdoš
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  3. J. Václav
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Additional information

We wish to thank Mr. A. Rajský for careful preparation of TiNy coatings on steel samples.

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Musil, J., Bárdoš, L. & Václav, J. Microhardness of thin TiN y coatings deposited by a circular planar magnetron. Czech J Phys 33, 669–673 (1983). https://doi.org/10.1007/BF01832153

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  • DOI: https://doi.org/10.1007/BF01832153

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