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Solubility of aluminium in silicon oxynitride

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Journal of Materials Science Letters

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Trigg, M.B., Jack, K.H. Solubility of aluminium in silicon oxynitride. J Mater Sci Lett 6, 407–408 (1987). https://doi.org/10.1007/BF01756778

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  • DOI: https://doi.org/10.1007/BF01756778

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