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Journal of Materials Science Letters

, Volume 5, Issue 10, pp 1061–1062 | Cite as

Application of a glow discharge ion gun to sputtering yield measurements

  • Zbigniew W. Kowalski
Article
  • 12 Downloads

Keywords

Polymer Glow Discharge Yield Measurement Sputter Yield Measurement 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

References

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Copyright information

© Chapman and Hall Ltd 1986

Authors and Affiliations

  • Zbigniew W. Kowalski
    • 1
  1. 1.Technical University of WrocławWrocławPoland

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