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Journal of Materials Science Letters

, Volume 7, Issue 3, pp 247–250 | Cite as

The preferred orientation of silicon films grown by Lpcvd at relatively low temperatures

  • Th. Karakostas
  • D. Meakin
  • P. Migliorato
  • J. Stoemenos
  • N. A. Economou
Article

Keywords

Polymer Silicon Prefer Orientation Silicon Film 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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Copyright information

© Chapman and Hall Ltd. 1988

Authors and Affiliations

  • Th. Karakostas
    • 1
  • D. Meakin
    • 2
  • P. Migliorato
    • 2
  • J. Stoemenos
    • 1
  • N. A. Economou
    • 1
  1. 1.Department of PhysicsAristoteles University of ThessalonikiThessalonikiGreece
  2. 2.Hirst Research CentreGEC Research LtdEast Lane, WembleyUK

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