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Crystal growth of iron silicide by chemical vapour deposition

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Journal of Materials Science Letters

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References

  1. M. C. BOUT and J. E. MEHAN,J. Appl. Phys. 58 (1985) 2696.

    Google Scholar 

  2. A. GUPUTA and J. T. YARDLAY, US Patent 4 468 474 (1984).

  3. H. IMAMURA and W. E. WALLACE,J. Phys. Chem. 83 (1979) 2009.

    Google Scholar 

  4. A. I. KHARLAMOV, A. N. RAFAL and L. A. DVORINA, Vysokotemperatur Boridy i Silitsidy (Kiev, 1982) p. 120;Chem. Abstr. 99 (1983) 146818p.

  5. T. NAKAMICHI, T. YAMADA and T. SATO,Kyotau Shisetau Gizyutau Kenkyu Hokoku (Tohoku Diagaka Kinzoku Zairyou Kankyusho) 10 (1983) 17.

  6. V. G. GUK and A. A. FROLOV,Kristallografiva 30 (1985) 166.

    Google Scholar 

  7. S. MOTOJIMA, T. HATTORI and K. YAMAGUCHI,J. Cryst. Growth 85 (1987) 309.

    Google Scholar 

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Authors and Affiliations

  1. Department of Applied Chemistry, Faculty of Engineering, Gifu University, 501-11, Gifu, Japan

    Seiji Motojima & Eiichiro Ito

  2. Research Laboratory, Toagosei Chemical Industry Co. Ltd, Funami-tyo, Minato-ku, 455, Nagoya, Japan

    Tatsuhiko Hattori

Authors
  1. Seiji Motojima
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  2. Eiichiro Ito
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  3. Tatsuhiko Hattori
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Motojima, S., Ito, E. & Hattori, T. Crystal growth of iron silicide by chemical vapour deposition. J Mater Sci Lett 8, 912–914 (1989). https://doi.org/10.1007/BF01729943

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  • DOI: https://doi.org/10.1007/BF01729943

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