Journal of Materials Science Letters

, Volume 5, Issue 12, pp 1242–1244 | Cite as

Annealing of ion-implanted GaAs by an intense short-pulse flash-tube

  • Juh-Tzeng Lue
  • Ming-Shyong Lin


Polymer GaAs 
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  1. 1.
    J. T. LUE,Appl. Phys. Lett. 36 (1980) 73.Google Scholar
  2. 2.
    J. T. LUE, Y. C. LIU and W. J. SHEN,ibid. 38 (1981) 372.Google Scholar
  3. 3.
    J. T. LUE and C. C. CHAO,Appl. Phys. 53 (1982) 984.Google Scholar
  4. 4.
    J. T. LUE, L. J. CHEN and L. R. LU,Solid State Electron. 25 (1982) 559.Google Scholar
  5. 5.
    J. T. LUE,J. Vacuum 32 (1982) 713.Google Scholar
  6. 6.
    J. M. GONEZ,Instrum. Soc. Am. 5 (1966) 1.Google Scholar
  7. 7.
    W. K. CHU, J. W. MAYER and M. A. NICOLET, “Backscattering Spectrometry” (Academic, New York, 1979) Ch. 4.Google Scholar
  8. 8.
    C. W. WHITE, B. R. APPLETON, B. STRITZKER, D. M. ZEHNER and S. R. WILSON, in “Laser and Electron-Beam Solid Interactions and Material Processing”, edited by J. F. Gibbons, L. D. Hess and T. W. Sigmon (North Holland, Amsterdam, 1981) p. 59.Google Scholar
  9. 9.
    A. Z. BELL,RCA Rev. 40 (1979) 295.Google Scholar
  10. 10.
    R. F. WOOD, D. H. LOWNDES and W. H. CHRISTIE,ibid., p. 231.Google Scholar
  11. 11.
    D. J. COLLIER, “Compound Semiconductor Technology” (Artech House, Massachusetts, 1979) p. 284.Google Scholar
  12. 12.
    G. A. SHIFRIN and R. G. HUNSPERGER,Appl. Phys. Lett. 17 (1970) 274.Google Scholar

Copyright information

© Chapman and Hall Ltd. 1986

Authors and Affiliations

  • Juh-Tzeng Lue
    • 1
  • Ming-Shyong Lin
    • 1
    • 2
  1. 1.Department of PhysicsNational Tsing Hua UniversityHsinchuChina
  2. 2.Department of Electrical EngineeringNational Tsing Hua UniversityHsinchuChina

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