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New "3S" method to examine surface roughness of broad ion-beam sputtered materials

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Journal of Materials Science Letters

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References

  1. O. AUCIELLO, in “Ion Bombardment Modification of Surfaces: Fundamentals and Applications”, edited by O. Auciello and R. Kelly (Elsevier, Amsterdam, 1984) pp. 435–62.

    Google Scholar 

  2. Z. W. KOWALSKI,J. Mater. Sci. Lett. 6 (1987) 69.

    Google Scholar 

  3. I. W. RANGEŁOW, Z. RADZIMSKI and W. CZARC-ZYNSKI,J. Vac. Sci. Technol. A1(2) (1983) 244.

    Google Scholar 

  4. Z. W. KOWALSKI,J. Mater. Sci. 17 (1982) 1627.

    Google Scholar 

  5. Idem, J. Mater. Sci. Lett. 5 (1986) 1271.

    Google Scholar 

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Authors and Affiliations

  1. Technical University of Wroctaw, 50-370, Wroctaw, Poland

    Zbigniew W. Kowalski & Daniel Jerzmański

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  1. Zbigniew W. Kowalski
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  2. Daniel Jerzmański
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Kowalski, Z.W., Jerzmański, D. New "3S" method to examine surface roughness of broad ion-beam sputtered materials. J Mater Sci Lett 6, 837–838 (1987). https://doi.org/10.1007/BF01729030

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  • DOI: https://doi.org/10.1007/BF01729030

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