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Application of warm Langmuir probe in the plasma measurements inside plasma-chemical reactor

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Abstract

In this report possibilities of application of warm Langmuir probe in the chemically active plasma are described. We present the results of some probe characteristic measurements obtained by means of cold and warm tungsten and platinum probe. Various types of interaction of the probe with plasma are discussed. All experiments have been performed in low-pressure glow DC discharge in argon contaminated with oil vapours. The measurements with both probes are compared with respect to their suitability for application in active low-pressure plasma.

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References

  1. Langmuir I. and Compton K. T.: Rev. Mod. Phys.3 (1931) 191.

    Google Scholar 

  2. Pekárek L., Kracík J., and Šícha M.: Fundamental concepts, problems and methods of plasma physics and technology (lecture notes), Faculty of Math. and Phys., Charles University, Prague, 1961 (in Czech).

    Google Scholar 

  3. Kalčík J.:in Proc. Week of Doctoral Students '93 (F-2 Section: Physics of Plasmas and Ionized Media), Charles University, Prague, 1993, p. 93.

    Google Scholar 

  4. Klagge S.: Plasmadiagnostik mit emittierenden Sonden (report), Fachrichtung Physik, E.A.M. Universität, Greifswald, 1987.

    Google Scholar 

  5. Herrmann D. and Klagge S.: Untersuchungen zur Lage des Raumpotentials in der 2. Ableitung der Sondencharakteristik mit Hilfe von Glühsonden (report), Fachrichtung Physik, E.A.M. Universität, Greifswald, 1971.

    Google Scholar 

  6. Eckertová L.: Electronics of the surfaces, SNTL, Prague, 1983 (in Czech).

    Google Scholar 

  7. Leipert J.: Control of probe measurement (diploma work). Pedagogical Faculty, České Budějovice, 1991 (in Czech).

    Google Scholar 

  8. Špatenka P.: Application of the plasma diagnostics probe method by build-up of polymer layer with metal particles (CSc. dissertation). Charles University, Prague, 1986 (in Czech).

    Google Scholar 

  9. Huddlestone R. and Leonard S.: Diagnostics of the plasma, Academy of Sciences, Moscow, 1965 (in Russian).

    Google Scholar 

  10. Remy H.: Inorganic chemistry, SNTL, Prague, 1971 (in Czech).

    Google Scholar 

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Authors and Affiliations

  1. Pedagogical Faculty, Department of Physics, University of South Bohemia, Jeronýmova 10, České Budě jovice, Czech Republic

    J. Kalčík

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  1. J. Kalčík
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Additional information

The author wishes to thank Prof. Dr. M. Šícha, DrSc. for his valuable comments. This work has been done within the framework of the Association for Research and Applications in Plasma Chemical Processes and has been supported by the FDR 0495 grant of the Grant Agency of the Ministry of Education, Youth and Physical Training of the Czech Republic and by the GA ČR 0659 grant of Grant Agency of the Czech Republic.

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Kalčík, J. Application of warm Langmuir probe in the plasma measurements inside plasma-chemical reactor. Czech J Phys 45, 241–248 (1995). https://doi.org/10.1007/BF01700265

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  • DOI: https://doi.org/10.1007/BF01700265

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