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Cathode sputtering of metals using copper ions

КАТОДНОЕ РАСПЫЛЕНИЕ МЕТАЛЛОВ ПОД ВЛИЯНИЕ М ИОНОВ МЕДИ

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Cechoslovackij fiziceskij zurnal B Aims and scope

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Now at the Institute of Vacuum Electronics, Czechosl. Acad. Sci., Prague

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Žižka, E. Cathode sputtering of metals using copper ions. Czech J Phys 12, 865–867 (1962). https://doi.org/10.1007/BF01689714

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  • DOI: https://doi.org/10.1007/BF01689714

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