Skip to main content
Log in

Langmuir probe diagnostics of the unbalanced magnetron discharge and its comparison with the classical magnetron

  • Letters to the Editor
  • Published:
Czechoslovak Journal of Physics Aims and scope

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

References

  1. Spencer A.G., Bishop C.A., Howson R.P.: Vacuum37 (1987) 363.

    Google Scholar 

  2. Oka K., Howson R.P.: in Proc. 6th Int. Conf. IPAT 87, Brighton, UK, May 1987 (Ed. R.P. Howson). CEP Consultants Ltd., Edinburg, 1987, p. 158.

    Google Scholar 

  3. Bárdoš L., Libra M., Krusteva A.P.: Czech. J. Phys. B36 (1986) 883.

    Google Scholar 

  4. Rosnagel S.M.: Thin Solid Films171 (1989) 125.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Bárdoš, L., Libra, M. & Kracík, J. Langmuir probe diagnostics of the unbalanced magnetron discharge and its comparison with the classical magnetron. Czech J Phys 41, 493–496 (1991). https://doi.org/10.1007/BF01597954

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF01597954

Keywords

Navigation