Skip to main content
SpringerLink
Log in

ALNx thin films produced by d.c. reactive magnetron sputtering

  • Letters to the Editor
  • Published:
Czechoslovak Journal of Physics B Aims and scope

Conclusion

Aluminium nitride is the very promising thin film material for piezoelectric /2,3/ and microelectronic /4,5/ applications. The high microhardness of AlNX films, verified in our experiment, opens new possibilities of practical utilization of these films.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. Aita C.R., Gawlak C.I.: J. Vac. Sci. Technol. A1 (1983) 403.

    Google Scholar 

  2. Shiosaki T. et al.: Appl.Phys.Lett. 36 (1980) 643.

    Google Scholar 

  3. Takedo F., Hata T.: Jap. J.Appl.Phys. 19 (1980) 1001.

    Google Scholar 

  4. Okamura S. et al.: Appl.Phys.Lett. 40 (1982) 689.

    Google Scholar 

  5. Bensalem R. et al.: Electron.Lett. 19 (1983) 112.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute of Physics, Czechosl.Acad.Sci., Na Slovance 2, 180 40, Praha 8, Czechoslovakia

    J. Švub & J. Musil

Authors
  1. J. Švub
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. J. Musil
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

We wish to thank O.Pártl of the Department of Materials of the Faculty of Nuclear Science and Physical Engineering in Prague for help with microhardness measurements.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Švub, J., Musil, J. ALNx thin films produced by d.c. reactive magnetron sputtering. Czech J Phys 35, 1191–1192 (1985). https://doi.org/10.1007/BF01596435

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF01596435

Keywords

Search

Navigation