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The effect of the ionization gauge on the composition of residual gases

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Czechoslovak Journal of Physics B Aims and scope

Abstract

The present work deals with the study of changes in the composition of residual gases caused by the action of an attached nude ionization gauge in an all-metal ultra-high vacuum system with an oil free pumping unit. The mass spectra of residual gases obtained when the ionization gauge was switched off and when it worked in two different operating modes are presented. They form a basis for the discussion of processes which take place in the ionization gauge and of their influence on the composition of residual gases. Some practical consequences of the studied effects for the measurement of very low pressures are discussed in the present paper.

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Řepa, P. The effect of the ionization gauge on the composition of residual gases. Czech J Phys 31, 695–708 (1981). https://doi.org/10.1007/BF01596324

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  • DOI: https://doi.org/10.1007/BF01596324

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