Abstract
The present work deals with the study of changes in the composition of residual gases caused by the action of an attached nude ionization gauge in an all-metal ultra-high vacuum system with an oil free pumping unit. The mass spectra of residual gases obtained when the ionization gauge was switched off and when it worked in two different operating modes are presented. They form a basis for the discussion of processes which take place in the ionization gauge and of their influence on the composition of residual gases. Some practical consequences of the studied effects for the measurement of very low pressures are discussed in the present paper.
Similar content being viewed by others
References
Rozgonyi G. A., Sosniak J.: Vacuum18 (1968) 1.
Moraw G.: Vacuum24 (1974) 125.
Redhead P. A., Hobson J. P., Kornelsen E. V.: The physical basis of ultrahigh vacuum, Chapman and Hall Ltd., London, 1968.
Řepa P.: Čs. čas. fys. A22 (1972), Suppl. 2275.
Moore G. E.: Bull. Am. Phys. Soc.4 (1959) 45.
Klopfer A., Garbe S., Schmidt W.: Vacuum10 (1960) 7.
Francken J. C., van der Waal J.: Vacuum10 (1960) 22.
Almer F. H. R., Perdijk H. J. R., van Zanten P. G.: Adv. Vac. Sci. Technol.2 (1960) 676.
Garbe S., Klopfer A., Schmidt W.: Vacuum10 (1960) 81.
Baronetzki E., Klopfer A.: Adv. Vac. Sci. Technol.1 (1960) 401.
Hickmott T. W.: J. Appl. Phys.21 (1960) 128.
Mimeault V. J., Hansen R. S.: Vacuum13 (1963) 229.
Hickmott T. W.: J. Chem. Phys.40 (1960) 810.
Holland L., Lauerson L., Allen P. G. W.: Trans. 8th AVS Symp., Pergamon Press (1962), 208.
Hickmott T. W.: J. Chem. Phys.40 (1960) 810.
Schlier R. E.: J. Appl. Phys.29 (1958) 1162.
Rhodin T. N., Rooner L. M.: Trans. AVS Vac. Symp.7 (1960) 228.
Cobic B., Carter G., Leak J. M.: Brit. J. Appl. Phys.12 (1961) 288.
Leck J. H., Carter G.: Adv. Vac. Sci. Technol.1 (1960) 463.
Dual Range Ionisation Gauge Control Unite-Instructions, Varian s.p.a., May 1970.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Řepa, P. The effect of the ionization gauge on the composition of residual gases. Czech J Phys 31, 695–708 (1981). https://doi.org/10.1007/BF01596324
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF01596324