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Adhesion of thin TiN films prepared by reactive d.c. magnetron sputtering

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Czechoslovak Journal of Physics B Aims and scope

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References

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Authors and Affiliations

  1. Institute of Physics, Czechosl.Acad.Sci., Na Slovance 2, 180 40, Prague 8, Czechoslovakia

    J. Musil, V. Poulek & V. Dušek

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  1. J. Musil
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  2. V. Poulek
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  3. V. Dušek
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Additional information

The authors are grateful to Mr.A.Rajský for the careful preparation of TiN coatings on steel samples.

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Musil, J., Poulek, V. & Dušek, V. Adhesion of thin TiN films prepared by reactive d.c. magnetron sputtering. Czech J Phys 34, 597–600 (1984). https://doi.org/10.1007/BF01595717

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  • DOI: https://doi.org/10.1007/BF01595717

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