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Ionic character of SrF2-B2O3-GeO2-SiO2 glasses for viscous flow and their applications to MOS capacitors

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Abstract

The capacitance and voltage (C-V) characteristics of metal, oxide, and semiconductors (MOS) capacitors passivated by SrF2-B2O3-GeO2-SiO2 glasses with various water and fluoride contents were investigated. As the OH− absorption coefficient of a glass increased, adverse effects on the recovery of shifts of the hysteresisC-V curve have been observed. The water content of ions is closely related to the fluoride content in the SrF2-B2O3-GeO2-SiO2 glass. The viscous-flow transition point of glass was lowered with increasing degree of ionic character obtained from Hannay's equation.

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  1. Toshiba ULSI Research Center, 1-Komukai, Toshiba-cho. Kawasaki, Japan

    K. Kobayashi & I. Mizushima

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  1. K. Kobayashi
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  2. I. Mizushima
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Kobayashi, K., Mizushima, I. Ionic character of SrF2-B2O3-GeO2-SiO2 glasses for viscous flow and their applications to MOS capacitors. Appl. Phys. A 62, 313–315 (1996). https://doi.org/10.1007/BF01594228

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  • DOI: https://doi.org/10.1007/BF01594228

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