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Laser deposited YBaCuO thin films

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Czechoslovak Journal of Physics Aims and scope

Abstract

YBa2Cu3O7-x thin films were deposited by laser ablation using KrF excimer laser. In deposition on polycrystalline ZrO2/(1−102) sapphire substrates influence of deposition conditions on film properties were studied. Zero resistance temperatureT z of 83 K of epitaxially grown YBaCuO films on poly-ZrO2/sapphire substrates was reached. Epitaxially grown yttria stabilized zirconia (YSZ) buffer layers were deposited by laser ablation on (1−102) sapphire substrates. On YSZ/sapphire, SrTiO3 and NdGaO3 substrates, temperatures Tz between 89–90 K were measured. Results of X-ray diffraction and SEM are also presented.

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We would like to express our thanks to L. Cibulka, L. and L. Rouček, and J. Stránský for their efficient help during the solution of technological problems connected with the construction of experimental apparatus.

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Jelínek, M., Jastrabík, L., Olšan, V. et al. Laser deposited YBaCuO thin films. Czech J Phys 43, 661–669 (1993). https://doi.org/10.1007/BF01591540

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  • DOI: https://doi.org/10.1007/BF01591540

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