Skip to main content
SpringerLink
Log in

Chemiluminescence of the silane — Active nitrogen reactions during PECVD of the silicon nitride films

  • Published:
Czechoslovak Journal of Physics B Aims and scope

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. Shiloh M., Gayer B., Brinckman F. E.: J. Electrochem. Soc.124 (1977) 295.

    Google Scholar 

  2. Shibagaki M., Horiike Y., Yamazaki T., Kashiwagi M.:in Proc. Electrochem. Soc. Fall, Meet., Atlanta, 1977, Electrochem. Soc, Princeton, NJ, Abstract 152, p. 416.

  3. Bárdoš L., Musil J., Taras P.: J. Phys. D.15 (1982) L 79.

    Google Scholar 

  4. Bárdoš L., Musil J., Taras P.: Thin Solid Films102 (1983) 107.

    Google Scholar 

  5. Perrin J., Delafosse E.: J. Phys. D.13 (1980) 759.

    Google Scholar 

  6. Pearse R. W. B., Gaydon A. G.: The identification of molecular spectra; 3rd ed., Chapman-Hall, London, 1963.

    Google Scholar 

  7. Morosanu C. E., Solutz V.: Vacuum31 (1981) no. 7, 309.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute of Physics, Czechosl. Acad. Sci., Na Slovance 2, 180 40, Prague 8, Czechoslovakia

    L. Bŕdoš & J. Musil

  2. Institute of Fluid Flow Machines, Polish Acad. Sci., Fiszera 14, 809 72, Gdańsk, Poland

    M. Lubański

Authors
  1. L. Bŕdoš
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. J. Musil
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. Lubański
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

The authors wish to thank Dr. P. Taras of the Institute of Plasma Physics of the Czechoslovak Academy of Sciences for helpfull discussions.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Bŕdoš, L., Musil, J. & Lubański, M. Chemiluminescence of the silane — Active nitrogen reactions during PECVD of the silicon nitride films. Czech J Phys 34, 1242–1245 (1984). https://doi.org/10.1007/BF01590071

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF01590071

Keywords

Search

Navigation