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The effect of heat treatment on intrinsic stress of A1 thin films

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Czechoslovak Journal of Physics B Aims and scope

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References

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  1. Research Institute of Electrotechnical Ceramics, Pospíšilova 281, 500 64, Hradec Králové, Czechoslovakia

    A. Kubový

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  1. A. Kubový
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Kubový, A. The effect of heat treatment on intrinsic stress of A1 thin films. Czech J Phys 33, 953–956 (1983). https://doi.org/10.1007/BF01589890

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