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Influence of substrate temperature on intrinsic stress and adhesion of evaporated films

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Czechoslovak Journal of Physics B Aims and scope

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Authors and Affiliations

  1. The Research Institute of Electrotechnical Ceramics, 500 64, Hradec Králové, Czechoslovakia

    A. Kubový & M. Janda

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  1. A. Kubový
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  2. M. Janda
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Kubový, A., Janda, M. Influence of substrate temperature on intrinsic stress and adhesion of evaporated films. Czech J Phys 26, 957–960 (1976). https://doi.org/10.1007/BF01589699

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  • DOI: https://doi.org/10.1007/BF01589699

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