Abstract
Time-resolved optical emission measurements have been made in laser-generated plumes following ArF-laser irradiation of GeO2 targets. The temporal behavior of Ge atoms is reported as a function of distance from the target surface and ambient pressure from vacuum to 200 m Torr of O2. An analysis of the expansion characteristics using a drag model provides good agreement with the experimental data and the dependence of the breaking of the plume expansion with oxygen pressure is established. The drag model analysis coupled with spectroscopic observations demonstrate a plume expansion process that is dominated by non-reactive collisional interactions between the background gas and the ejected species. The results of this study are also discussed with respect to thin-film deposition by laser ablation.
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