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Pyrolytic LCVD of fibers: A theoretical description

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Abstract

The pyrolytic LCVD (Laser-induced Chemical Vapor Deposition) of fibers is studied theoretically. The shape of fibers and the temperature distribution are calculated self-consistently on the basis of a one-dimensional model which takes into account changes of the radius along the fiber. The influence of different parameters on the fiber radius and the temperature is discussed. The parameters investigated include the laser power and spot size, the activation energy of the deposition reaction, diffusion limitations in the gas phase, and temperature dependences of the heat conductivities of the deposit and the gas. The results are applied to the pyrolytic growth of Si fibers from SiH4 + H2.

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References

  1. D. Bduerle:Chemical Processing with Lasers, Springer Ser. Mater. Sci. Vol. 1 (Springer, Berlin, Heidelberg 1986) D. Bäuerle:Laser Processing and Chemistry (Springer, Berlin, Heidelberg 1996)

    Google Scholar 

  2. D.J. Ehrlich, J.Y. Tsao (eds.):Laser Microfabrication- Thin Film Processes and Lithography (Academic, New York 1989)

    Google Scholar 

  3. I.W. Boyd (ed.):Laser Surface Processing and Characterization, EMRS Symp. Proc.24 (North-Holland. Amsterdam 1992)

    Google Scholar 

  4. G. Leyendecker, D. Bäuerle, P. Geittner, H. Lydtin: Appl. Phys. Lett.39, 921 (1981)

    Google Scholar 

  5. D. Bäuerle, P. Irsigler, G. Leyendecker, H. Noll, D. Wagner: Appl. Phys. Lett.40, 819 (1982)

    Google Scholar 

  6. R. Kullmer, B. Kargl, D. Bäuerle: Thin Solid Films218, 122 (1992)

    Google Scholar 

  7. M. Jubber; J.I.B. Wilson, J.L. Davidson, P.A. Fernie, P. John: Appl. Phys. Lett.55, 1477 (1989)

    Google Scholar 

  8. T.H. Baum, P.B. Comita, T.T. Codas: SPIE Proc.1598, 122 (1991)

    Google Scholar 

  9. N. Arnold, D. Bäuerle: Microelectron. Eng.20, 43 (1993)

    Google Scholar 

  10. J. Han, K.F. Jensen: J. Appl. Phys.75, 2240 (1994)

    Google Scholar 

  11. N. Arnold, P.B. Kargl, D. Bäuerle: Appl. Surf. Sci.36, 457 (1994)

    Google Scholar 

  12. D. Bäuerle, G. Leyendecker, D. Wagner, E. Bauser, Y.C. Lu: Appl. Phys. A30, 147 (1983)

    Google Scholar 

  13. P.C. Nordine; S.C. de la Veaux, F.T. Wallenberg: Appl. Phys. A57, 97 (1993)

    Google Scholar 

  14. S. Johansson, J. Schweitz, H. Westberg, M. Boman: J. Appl. Phys.72, 5956 (1992)

    Google Scholar 

  15. H. Westberg, M. Boman, S. Johansson, J. Schweitz: J. Appl. Phys.73, 7864 (1993)

    Google Scholar 

  16. H.S. Carslaw, J.C. Jaeger:Conduction of Heat in Solids (Oxford Univ. Press, New York 1959)

    Google Scholar 

  17. D. Bäuerle, B. Luk'yanchuk, K. Piglmayer: Appl. Phys. A50, 385 (1990)

    Google Scholar 

  18. J. Mathews, R.L. Walker:Mathematical Methods of Physics (W. Benjamin, New York 1970)

    Google Scholar 

  19. J. Doppelbauer: Linz (1987) Kinetische Untersuchungen an laser induzierten pyrolytischen Prozessen. Dissestation

  20. J. Doppelbauer, D. Bäuerle: InInterfaces Under Laser Irradiation, ed. by L.D. Laude, D. Bäuerle, M. Wautelet, NATO ASI Ser.E 134, 277 (Nijhofff, Dordrecht 1987)

    Google Scholar 

  21. Gas Encyclopedia (Elsevier, Amsterdam 1976)

  22. G.G. Bentini, M. Bianconi, C. Summonte: Appl. Phys. A45, 821 (1988)

    Google Scholar 

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Authors and Affiliations

  1. Angewandte Physik, Johannes-Kepler-Universität, Linz, A-4040, Linz, Austria

    N. Arnold, E. Thor, N. Kirichenko & D. Bäuerle

Authors
  1. N. Arnold
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  2. E. Thor
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  3. N. Kirichenko
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  4. D. Bäuerle
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Correspondence to N. Arnold.

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On leave from: General Physics Institute, Academy of Sciences, 117942 Moscow, Russia

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Arnold, N., Thor, E., Kirichenko, N. et al. Pyrolytic LCVD of fibers: A theoretical description. Appl. Phys. A 62, 503–508 (1996). https://doi.org/10.1007/BF01571683

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  • DOI: https://doi.org/10.1007/BF01571683

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