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Application of BaF2-B2O3-GeO2-SiO2 glasses to metal-oxide-silicon field-effect transistors

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Abstract

The capacitance and voltage characteristics of field effect transistors passivated by BaF2-B2O3-GeO2-SiO2 glasses with various water contents were investigated. As the OH absorption coefficients of the glass increased, adverse effects on the recovery of hysteresisC-V curve shifts was seen. The water content is related to the fluoride content of the BaF2−B2O3−GeO2−SiO2 glass. The viscous flow point of the glass was lowered with increasing ionic character obtained from Hannay's equation. The source-drain current and voltage (I-V) characteristics of typical enhancement and depletion mode field effect transistors passivated with these glasses were investigated.

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References

  1. K.H. Hurley: Solid State Technol.30, 103 (1987)

    Google Scholar 

  2. J.E. Dickinson Jr., B.H.W.S. deJong: J. Non-Cryst. Solids102, 196 (1988)

    Google Scholar 

  3. N.F. Raley, D.L. Losee: J. Electrochem. Soc.135, 2640 (1988)

    Google Scholar 

  4. G.L. Schnable, A.W. Fisher, J.M. Shaw: J. Electrochem. Soc.135, 3973 (1990)

    Google Scholar 

  5. K. Kobayashi: J. Non-Cryst. Solids88, 229 (1986)

    Google Scholar 

  6. K. Kobayashi: J. Non-Cryst. Solids (submitted)

  7. K. Kobayashi: J. Electrochem. Soc.131, 2190 (1984)

    Google Scholar 

  8. S. Rojas, R. Gomarasca, Zanotti, A. Borghesi, A. Sassela, G. Ottaviani, L. Moro, P. Lazzeri: J. Vac. Sci. Technol. B10, 633 (1992)

    Google Scholar 

  9. S.C. Li, S.P. Murarka, X.S. Guo, W.A. Lanford: J. Appl. Phys.72, 2947 (1992)

    Google Scholar 

  10. K. Kobayashi: Jpn. J. Appl. Phys.22, L70 (1983)

    Google Scholar 

  11. G. Baret, R. Madar, C. Bernard: J. Electrochem. Soc.138, 2836 (1991)

    Google Scholar 

  12. K. Kobayashi: J. Non-Cryst. Solids159, 274 (1993)

    Google Scholar 

  13. K. Kobayashi: Glass Technol.29, 253 (1988)

    Google Scholar 

  14. K. Kobayashi: Glass Technol.30, 110 (1989)

    Google Scholar 

  15. N.B. Hannay, C.P. Smyth: J. Am. Chem. Soc.68, 171 (1946)

    Google Scholar 

  16. K. Kobayashi: J. Non-Cryst. Solids124, 223 (1990)

    Google Scholar 

  17. C.N. Shaw, J.E. Shelby: Phys. Chem. Glasses,34, 35 (1993)

    Google Scholar 

  18. K. Kobayashi: Glass Technol.34, 120 (1993)

    Google Scholar 

  19. J.A. Ruller, J.E. Shellby: Phys. Chem. Glasses33, 177 (1992)

    Google Scholar 

  20. Z. Liang, G.H. Frischat: J. Non-Cryst. Solids163, 169 (1993)

    Google Scholar 

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Kobayashi, K. Application of BaF2-B2O3-GeO2-SiO2 glasses to metal-oxide-silicon field-effect transistors. Appl. Phys. A 61, 377–380 (1995). https://doi.org/10.1007/BF01540111

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  • DOI: https://doi.org/10.1007/BF01540111

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