Eine Objektkammer mit universell beweglichem Präparattisch für Elektronenbeugungsuntersuchungen

Abstract

A new specimen stage has been developed for the adjustment of specimens in reflection diffraction experiments. It permits small areas of the object surface to be investigated individually at different orientations, for all axes of rotation intersect in one point on which the electron beam is directed. To obtain a welldefined orientation of the specimen, its surface has first to be adjusted orthogonal to the azimuthal axis of rotation, so that the azimuth and, by inclining the azimuthal axis, the angle of incidence can be chosen independently. In order to bring other parts of the object surface to examination, the specimen can be displaced in two orthogonal directions lying within its surface, and in one direction perpendicular to it. During diffraction investigations, the object can be observed simultaneously with a light microscope, by which means the selection of the area to be examined is facilitated and some additional information relative to the geometry of the surface and the present orientation of the specimen may be obtained.