Abstract
When polycrystalline target materials are sputtered with high energy Ar+-ions at oblique ion incidence, the anisotropy of the low energy flux beneath the target surface can be estimated from the asymmetry of the angular distribution. As too it is predicted from random cascade theory, the measured emission profiles are almost symmetrical to the target normal indicating an isotropical flux of recoils inside the target. Nevertheless even symmetrical emission profiles show characteristic deviations from the cosine law. They have to be related to the low energy cascade, which strongly depends on lattice structure and surface binding. Born-Mayer repulsion, a surface atom suffers from its next neighbours when it is ejected, is proposed to generate these differences among the specific emission profiles.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Sigmund, P.: Phys. Rev.184, 383 (1969)
Sigmund, P.: Rev. Roum. Phys.17, 823,17, 969,17, 1079 (1972)
Betz, G., Dobrozemsky, R. Viehböck, F.P.: Ned. Tijdschrift voor Vacuuümtechn.8, 203 (1970)
Rödelsperger, K., Scharmann, A.: Nucl. Instr. and Meth.132, 355 (1976)
Sanders, J.B.: Thesis, Leiden (1968)
Sanders, J.B., Roosendaal, H.E.: Rad. Effects24, 161 (1975)
Sigmund, P., Matthies, M.T., Phillips, D.L.: Rad. Effects11, 39 (1971)
Littmark, U., Sigmund, P.: J. Phys. D: Appl. Phys.8, 241 (1975)
Littmark, U., Sigmund, P.: 6th. Conf. on Atomic Collisions in Solids, Amsterdam (1975)
Rödelsperger, K.: Thesis, Giessen (1977)
Rödelsperger, K., Scharmann, A.: VIII International Summer School and Symposium on the Physics of Ionized Gases, Dubrovnik (1976)
Krüger, W., Rödelsperger, K., Scharmann, A.: Z. Physik262, 315 (1973)
Nelson, R.S., Mazey, D.J.: Rad. Effects18, 127 (1973)
Lehmann, C., Sigmund, P.: Phys. Stat. Solidi16, 507 (1966)
Weijsenfeld, C.H.: Thesis, Utrecht (1966) Philips Res. Repts. Suppl.2 (1967)
Robinson, M.T.: J. Appl. Phys.46, 4982 (1969)
Hofer, W.O.: Rad. Effects17, 281 (1973)
Harrison, D.E., Jr., Moore, W.L., Jr., Holcombe, H.T.: Rad. Effects17, 167 (1973)
Thompson, M.W.: Phil. Mag.18, 377 (1968)
Nelson, R.S.: Rad. Effects7, 263 (1971)
Musket, R.G., Smith, H., Jr.: J. Appl. Phys.39, 3579 (1968)
Andersen, H.H., Sigmund, P.: Risø Report103 (1965)
Carter, G., Colligon, J.S.: Ion Bombardment of Solids, Heineman Educational Bks, London (1968)
Onderdelinden, D.: Can. J. Phys.46, 739 (1968)
Sigmund, P.: Appl. Phys. Letters25, 171 (1974)
Nelson, R.S., Thompson, M.W., Montgomery, H.: Phil. Mag.7, 1385 (1962)
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Rödelsperger, K., Scharmann, A. Angular distributions of atoms sputtered from polycrystalline FCC- and BCC-metals. Z Physik B 28, 37–42 (1977). https://doi.org/10.1007/BF01313947
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF01313947