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The origin of internal stresses in amorphous transition metal alloy films

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Zeitschrift für Physik B Condensed Matter

Abstract

Amorphous binary-alloy films of ZrCu and ZrCo prepared by electron-beam evaporation show considerable mechanical stresses, which are measured by a capacitive cantilever beam technique. Tensile and compressive stresses are observed, dependent on composition, substrate temperature, and film thickness. The values of the tensile stresses are explained in a freezing model in correlation to a characteristic temperature of the amorphous alloy (glass transition temperature). The thickness dependent compressive stresses can be made plausible by a Stranski-Krastanov growth of the amorphous films which includes a substrate-film interaction due to the specific surface energy and the surface roughness of the films.

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Authors and Affiliations

  1. I. Physikalisches Institut der Universität Göttingen, Bunsenstrasse 9, D-3400, Göttingen, Federal Republic of Germany

    M. Moske & K. Samwer

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  1. M. Moske
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  2. K. Samwer
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Dedicated to Prof. Dr. G. von Minnigerode on the occasion of his 60th birthday

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Moske, M., Samwer, K. The origin of internal stresses in amorphous transition metal alloy films. Z. Physik B - Condensed Matter 77, 3–9 (1989). https://doi.org/10.1007/BF01313612

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  • DOI: https://doi.org/10.1007/BF01313612

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