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On the applicability of the sharp interface model in modelling the kinetics of the direct nitridation of silicon

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Journal of Materials Science Letters

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Jovanovic, Z.R. On the applicability of the sharp interface model in modelling the kinetics of the direct nitridation of silicon. J Mater Sci Lett 14, 1263–1267 (1995). https://doi.org/10.1007/BF01262262

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  • DOI: https://doi.org/10.1007/BF01262262

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