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Quantitative chemical phase imaging by means of energy filtering transmission electron microscopy

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Abstract

Electron spectroscopic imaging (ESI) in the transmission electron microscope (TEM) is a powerful method to produce 2-dimensional elemental distribution maps. These maps show in a clear way the chemical situation of a small specimen region. In this work we used a Gatan Imaging Filter (GIF) attached to a 200 kV TEM to investigate a Ba-Nd-titanate ceramic. The three phases occuring in this material could be visualized using inner-shell ionization edges (Ba M45, Nd M45 and Ti L23). We applied different image correlation techniques to the ESI elemental maps for direct visualization of the chemical phases. First we simply overlaid the elemental maps assigning each element one colour to form an RGB image. Secondly we used the technique of scatter diagrams to classify the different phases. Finally we quantified the elemental maps by dividing them and multiplying them by the appropriate inner-shell ionization cross-sections which gave atomic ratio images. By using these methods we could clearly identify and quantify the various phases in the Ba-Nd-titanate specimen.

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References

  1. R. F. Egerton,Electron Energy-Loss Spectroscopy in the Electron Microscope, Plenum, New York, 1986.

    Google Scholar 

  2. W. C. de Bruijn, C. W. J. Sorber, E. S. Gelsema, A. L. D. Beckers, J. F. Jongkind,Scanning Microsc. 1993,7, 693.

    Google Scholar 

  3. C. Jeanguillaume, M. Tence, P. Trebbia, C. Colliex,Scanning Electron Microsc./II, SEM AMF O'Hare, Chicago, IL, 1983, p. 745.

    Google Scholar 

  4. L. Reimer, I. Fromm, C. Hülk, R. Rennekamp,Microsc. Microanal. Microstruct. 1992,3, 141.

    Google Scholar 

  5. D. Krahl;Mater. Wiss. Werkst. Tech. 1990,21, 84.

    Google Scholar 

  6. F. Hofer, P. Warbichler, W. Grogger,Ultramicroscopy 1995,59, 31.

    Google Scholar 

  7. M. Rühle, J. Mayer, J. C. H. Spence, J. Bihr, W. Probst, E. Weimer,Proc. 49 th EMSA Meeting, San Francisco Press, 1991, p. 706.

  8. J. M. Mayer,Proc. 50 th EMSA Meeting, San Francisco Press, 1992, p. 1198.

  9. O. L. Krivanek, A. J. Gubbens. N. Dellby,Microsc. Microanal. Microstruct. 1991,2, 315.

    Google Scholar 

  10. O. L. Krivanek, A. J. Gubbens, N. Dellby, C. E. Meyer;Microsc. Microanal. Microstruct. 1992,3, 187.

    Google Scholar 

  11. F. Hofer, P. Warbichler,Proc. MAS Meeting (E. S. Eba, ed.), VCH, 1995, p. 295.

  12. C. Colliex, M. Tence, E. Lefevre, C. Mory, H. Gu, D. Bouchet, C. Jeanguillaume,Microchim. Acta 1994,114/115, 71.

    Google Scholar 

  13. R. D. Leapman, J. A. Hunt, in:Microscopy: The Key Research Tool (C. E. Lyman, L. D. Peachey, R. M. Fisher, eds.), The Electron Microscopy Society of America, Woods Hole, MA, 1992, p. 39.

    Google Scholar 

  14. P. E. Batson, N. D. Browning, D. A. Muller,MSA Bulletin 1994,24, 371.

    Google Scholar 

  15. F. Hofer, P. Warbichler,Prakt. Met. 1988,25, 82.

    Google Scholar 

  16. A. Berger, H. Kohl,Optik 1993,92, 175.

    Google Scholar 

  17. D. E. Johnson, in:Introduction to Analytical Electron Microscopy, Plenum, New York, 1979, p. 245.

    Google Scholar 

  18. O. L. Krivanek, A. J. Gubbens, M. K. Kundman, G. C. Carpenter,Proc. 51 st EMSA Meeting. San Francisco Press, 1993, p. 586.

  19. M. M. El Gomati, D. C. Peacock, M. Prutton, C. G. Walker,J. Microsc. 1987,147, 149.

    Google Scholar 

  20. M. Prutton, M. M. El Gomati, P. G. Kenny,J. Elec. Spec. Rel. Phen. 1990,52, 197.

    Google Scholar 

  21. R. Browning,J. Vac. Sci. Technol. 1985,A3(5), 1959.

    Google Scholar 

  22. Ch. Latkoczy,Dipl. Thesis, Techn. Univ. Vienna, 1994.

  23. D. S. Bright, D. E. Newbury, R. B. Marinenko,Microbeam Analysis, San Francisco Press, 1988, p. 18.

  24. D. S. Bright, D. E. Newbury,Anal. Chem. 1994,63, 243.

    Google Scholar 

  25. F. Hofer,Ultramicroscopy 1987,21, 63.

    Google Scholar 

  26. F. Hofer, P. Golob,Micron and Microscopica Acta 1988,19, 73.

    Google Scholar 

  27. F. Hofer,Microsc. Microanal. Microstruct. 1991,2, 215.

    Google Scholar 

  28. N. Bonnet, C. Colliex, C. Mory, M. Tence,Scanning Microscopy [Suppl. 2], SEM Chicago, AMF O'Hare, IL, 1988, p. 351.

    Google Scholar 

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Dedicated to Professor Dr. rer. nat. Dr. h.c. Hubertus Nickel on the occasion of his 65th birthday

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Grogger, W., Hofer, F. & Kothleitner, G. Quantitative chemical phase imaging by means of energy filtering transmission electron microscopy. Mikrochim Acta 125, 13–19 (1997). https://doi.org/10.1007/BF01246156

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