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New developments in theory of fast electron scattering in solids: Applications to microbeam analysis

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Abstract

The study of fast electron interaction with solids in the energy range from 100 eV to several tens of keV is prompted by quickly developing microbeam analysis techniques such as electron probe microanalysis, scanning electron microscopy, electron energy loss spectroscopy and so on. It turned out that for random solids the electron transport problem might be solved on the basis of the generalized radiative field similarity principle. The latter states that the exact differential elastic cross section in the kinetic equation may be replaced by an approximate one provided the conditions of radiative field similarity are fulfilled. Application of the generalized similarity principle to electron scattering in solids has revealed many interesting features of electron transport. Easy to use and effective formulae have been obtained for the angular and energy distribution of electrons leaving a target, total yields of characteristic photons and slow electrons escaping from a sample bombarded by fast primaries, escape probability of Auger electrons as a function of depth etc. The analytical results have been compared with Monte Carlo calculations and experiments in a broad range of electron energies and scattering properties of solids and good agreement has been observed.

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Authors and Affiliations

  1. Moscow Engineering Physics Institute, Kashirskoye sh. 31, 115409, Moscow, Russia

    I. S. Tilinin

  2. Institute für Allgemeine Physik/134, Vienna University of Technology, Wiedner Hauptstrasse 8-10, A-1040, Vienna, Austria

    W. S. M. Werner

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  1. I. S. Tilinin
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  2. W. S. M. Werner
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Tilinin, I.S., Werner, W.S.M. New developments in theory of fast electron scattering in solids: Applications to microbeam analysis. Mikrochim Acta 114, 485–503 (1994). https://doi.org/10.1007/BF01244576

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