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Quantitative analysis of films by ion microbeam methods. I: RBS, NRA, and channeling

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Abstract

The aim of this review paper is to illustrate the application of the so-called nuclear techniques, i.e. MeV ion beam techniques, to the analysis of thin solid films. First a brief description of the basic interaction processes between an energetic ion and solid matter is given in order to clarify the fundamental basis of the different techniques. Then the main features and an application overview of Rutherford backscattering spectrometry (RBS), nuclear reaction analysis (NRA) and channeling are presented.

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References

  1. J. F. Ziegler,The Stopping and Ranges of Ions in Matter, Pergamon, New York 1977.

    Google Scholar 

  2. A. Armigliato, G. G. Bentini, G. Ruffini, G. Battaglin, G. Della Mea, A. V. Drigo,Nucl. Instrum. Meth. 1978,149, 653.

    Google Scholar 

  3. G. De Marchi, P. Mazzoldi, G. Battaglin, A. Valentini, M. Gaudio, A. Losacco, A. Miotello, R. Dal Maschio,Glasses for Optoelectronics, SPIE Vol. 1128, 1989, p. 117.

    Google Scholar 

  4. C. Cohen, J. A. Davies, A. V. Drigo, T. E. Jackman,Nucl. Instrum Meth. 1983,218, 147.

    Google Scholar 

  5. W. K. Chu, J. W. Mayer, M. A. Nicolet,Backscattering Spectrometry, Academic Press, New York, 1977.

    Google Scholar 

  6. L. C. Feldman, J. W. Mayer,Fundamentals of Surface Thin Film Analysis, Elsevier, New York, 1986.

    Google Scholar 

  7. G. Amsel, D. Samuel,Anal. Chem. 1967,39, 1689.

    Google Scholar 

  8. J. Lindhard,Mat. Fys. Medd. Dan. Vid. Selsk. 1965,34, 1.

    Google Scholar 

  9. L. C. Feldman, J. W. Mayer, S. T. Picraux,Materials Analysis by Ion Channeling, Academic Press, New York, 1982.

    Google Scholar 

  10. A. Carnera, A. V. Drigo, P. Mazzoldi,Radiat. Eff. 1980,49, 29.

    Google Scholar 

  11. M. Berti, G. Brusatin, A. Camera, A. Gasparotto, R. Fabbri,Nucl. Instrum. Meth. 1993,B80/81, 58.

    Google Scholar 

  12. F. Romanato, M. Mazzer, A. V. Drigo,Nucl. Instrum. Meth. 1992,B63, 36.

    Google Scholar 

  13. M. Mazzer, A. V. Drigo, F. Romanato,Nucl. Instrum. Meth. 1992,B64, 103.

    Google Scholar 

  14. A. Camera, G. C. Celotti, A. V. Drigo,Proceedings of the Intern. Symp. Three Day In-Depth Review on the Nuclear Accelerator Impact in the Interdisciplinary Field, Laboratori Nazionali di Legnaro, 1984, p. 295.

  15. A. Camera, A. V. Drigo,Nucl. Instrum. Meth. 1990,B44, 357.

    Google Scholar 

  16. A. Armigliato, M. Servidori, F. Cembali, R. Fabbri, R. Rosa, F. Corticelli, D. Govoni, A. V. Drigo, M. Mazzer, F. Romanato, S. Fabbroni, R. Balboni, S. S. Iyer, A. Guerrieri,Microsc. Microanal. Microstruct. 1992,3, 363.

    Google Scholar 

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Authors and Affiliations

  1. Department of Physics, University of Padua and GNSM-INFM, Via Marzolo 8, 1-35131, Padova, Italy

    Antonio V. Drigo

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  1. Antonio V. Drigo
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Drigo, A.V. Quantitative analysis of films by ion microbeam methods. I: RBS, NRA, and channeling. Mikrochim Acta 114, 89–106 (1994). https://doi.org/10.1007/BF01244535

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