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Electron energy loss spectrometry mapping

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Abstract

Among electron beam microanalytical techniques, electron energy loss spectrometry (EELS) offers unique advantages in terms of information content, sensitivity, limits of detection. This paper describes new methods and tools for acquiring families of spectra over many pixels on the specimen, i.e. spectrumimages, and for processing them. Applications in different fields of research, both in materials science and in life sciences, demonstrate the potential impact of the technique for characterizing nano-sized structures.

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Authors and Affiliations

  1. Laboratoire de Physique des Solides Associé au CNRS, Université Paris-Sud, Bâtiment 510, F-91405, Orsay, France

    Christian Colliex, Marcel Tencé, Elisabeth Lefèvre, Claudie Mory, Hui Gu, Daniěle Bouchet & Christian Jeanguillaume

Authors
  1. Christian Colliex
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  2. Marcel Tencé
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  3. Elisabeth Lefèvre
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  4. Claudie Mory
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  5. Hui Gu
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  6. Daniěle Bouchet
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  7. Christian Jeanguillaume
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Colliex, C., Tencé, M., Lefèvre, E. et al. Electron energy loss spectrometry mapping. Mikrochim Acta 114, 71–87 (1994). https://doi.org/10.1007/BF01244534

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