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Recoil spectrometry: Ion accelerator based elemental characterisation of surface layers

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Abstract

Recoil Spectrometry covers a group of techniques that are very similar to the well known Rutherford backscattering Spectrometry technique, but with the important difference that one measures the recoiling target atom rather than the projectile ion. This makes it possible to determine both the identity of the recoil and its depth of origin from its energy and velocity, using a suitable detector system. The incident ion is typically high-energy (30–100MeV)35C1,81Br or127I. Low concentrations of light elements such as C, O and N can be profiled in a heavy matrix such as Fe or GaAs. Here we present an overview of mass and energy dispersive recoil Spectrometry and illustrate its successful use in some typical applications.

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Author notes

  1. Erik Johanson

    Present address: Institute for Surface Chemistry, Box 5607, S-11486, Stockholm, Sweden

Authors and Affiliations

  1. Department of Nuclear Physics, Lund Institute of Technology, Sölvegatan 14, S-223 62, Lund, Sweden

    Harry J. Whitlow, Mikael Hult, Leif Persson & Mohamed El Bouanani

  2. Department of Inorganic Chemistry, Uppsala University, Box 531, S-751 21, Uppsala, Sweden

    Margaretha Andersson

  3. Department of Electronics, Solid State Electronics, Royal Institute of Technology, PO Box Electrum 229, S-164 40, Kista, Sweden

    Mikael Östling, Carina Zaring & Nils Lundberg

  4. Australian Nuclear Science and Technology Organisation, PMB 1, 2234, Menai, Australia

    David D. Cohen & Nick Dytlewski

  5. Department of Applied Physics, The Royal Melbourne Institute of Technology, GPO Box 2476V, 3001, Melbourne, Australia

    Peter N. Johnston, Ian F. Bubb & Scott R. Walker

  6. Teknikum, Uppsala University, Box 531, S-751 21, Uppsala, Sweden

    Erik Johanson, Sture Hogmark & P. Anders Ingemarsson

Authors
  1. Harry J. Whitlow
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  16. P. Anders Ingemarsson
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Whitlow, H.J., Andersson, M., Hult, M. et al. Recoil spectrometry: Ion accelerator based elemental characterisation of surface layers. Mikrochim Acta 120, 171–181 (1995). https://doi.org/10.1007/BF01244430

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  • DOI: https://doi.org/10.1007/BF01244430

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