Abstract
Extensive reviews exist for different modes and energy ranges of ion scattering but few articles deal with the similarity of approach between energy ranges. There are a number of aspects of ion scattering which exhibit a gradual change over the energy range from 100eV to 10MeV and this affects the application of the technique, the detection methods and the information which can be derived from the analysis.
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O'Connor, D.J. Ion scattering from 0.1 keV to 10 MeV: A brief review. Mikrochim Acta 120, 159–170 (1995). https://doi.org/10.1007/BF01244429
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DOI: https://doi.org/10.1007/BF01244429