Abstract
Glow discharge spectroscopy (GDOS) will be shown to be a quick, informative and simple method for quantitative depth profile analysis of elements of nitrided layers well suited for their quality control. By systematic variation of all glow discharge determining parameters it is possible to get an excellent depth resolution in the order of sub-μm corresponding to a comparatively large analytical activated area (50 mm2). In this paper the behaviour of a number of important parameters related to sputtering of the activated area will be discussed. Some quantitative GDOS depth profiles of carbon and nitrogen of pure iron samples nitrided by different procedures will be shown as examples for application.
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Rose, E., Mayr, P. Analysis of nitrogen-influenced surface near zones of ferrous materials by glow discharge spectroscopy (GDOS). Mikrochim Acta 97, 197–212 (1989). https://doi.org/10.1007/BF01242466
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DOI: https://doi.org/10.1007/BF01242466