Abstract
The potential of a scanning electron microscope will be enhanced markedly by adapting the X-ray fluorescence for material analysis. The illuminating system “röntgenbox” enables the analyst to execute analyses in the concentration range from 100 percent down to the low ppm range without time consuming preparation steps. X-ray intensities of traces are measured for different anodes in the elemental range fromZ=11 to 90 (sodium to thorium).
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
R. Eckert,Scanning Electron Microscopy 1983,4, 1535.
R. Eckert, S. Steeb,Mikrochim. Acta [Wien] 1983,Suppl. 10, 271.
R. Eckert,Scanning 1986,8, 232.
R. Eckert,Beitr. elektronenmikr. Direktabb. Oberfl. 1986,19, 125.
W. Plannet,The Röntgenbox (Leaflet), Marburger Strasse 90, D-355 Marburg 7, Federal Republic of Germany, 1986.
R. Woldseth,X-Ray Spectrometry, Kevex Corp., Burlingame, CA, USA, 1973.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Eckert, R. Quantitative trace analysis with X-ray fluorescence in the scanning electron microscope. Mikrochim Acta 91, 193–200 (1987). https://doi.org/10.1007/BF01199495
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF01199495