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Depth profiling in surface regions of oxidized metal alloys by low energy PIXE

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Abstract

As a nondestructive technique for depth profiling of elements the PIXE-method was applied to determine the concentration profile of elements in the near surface of oxidized metal alloys. The outer region of about 1 μm was investigated using low energy protons for X-ray excitation. A set of X-ray yield measurements was carried out at proton energies of 150 to 300 keV. The unfolding of the X-ray yields was performed by calculation of proton energy loss, X-ray production cross section and X-ray attenuation.

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Drüke, V., Hecker, R. & Stöver, D. Depth profiling in surface regions of oxidized metal alloys by low energy PIXE. Mikrochim Acta 91, 85–91 (1987). https://doi.org/10.1007/BF01199481

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  • DOI: https://doi.org/10.1007/BF01199481

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