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Progress in materials analysis with SIMS: Quantitative surface and interface characterization

Fortschritte der Werkstoffanalyse mit SIMS: Quantitative Grenzflächencharakterisierung

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Summary

The potential and limitations of SIMS for quantitative surface and interface characterization of technical materials are described. Quantification procedures, figures of merit and analytical strategies are discussed for surface characterization of single cristals (dopant elements in Si), homogeneous metallic thin films (multielement trace analysis), heterogeneous glass layer structures (corrosion behaviour), polycristalline metals with precipitations (C, O, Al, Si in steel) and interface analysis by depth profiling (Cr distribution in Si3N4/GaAs) as well as step scanning (segregation studies of P in W-NiFe).

Zusammenfassung

Die Möglichkeiten und Grenzen von SIMS für die quantitative Grenzflächencharakterisierung in Werkstoffen wurden beschrieben. Quantifizierungsverfahren, analytische Gütekennziffern und Strategien wurden an folgenden Beispielen diskutiert: Oberflächenanalyse von Einkristallen (Dotierungselemente in Silizium), homogenen metallischen Dünnfilmstrukturen (Multielement-Spurenanalyse) und polykristallinen Materialien mit Ausscheidungen (C, O, Al, Si in Stahl); Grenzflächenanalyse durch Aufnahme von Tiefenprofilen (Verteilung von Cr zwischen Si3N4 und GaAs) und Linienprofilen (Segregation von P in W-NiFe).

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Authors and Affiliations

  1. Institute for Analytical Chemistry, Technical University Vienna, Academy of Fine Arts, Vienna

    M. Grasserbauer, G. Stingeder, P. Wilhartitz, M. Schreiner & U. Traxlmayr

  2. Institute for General Electrical Engineering and Electronics, Technical University, Vienna

    M. Grasserbauer, G. Stingeder, P. Wilhartitz, M. Schreiner & U. Traxlmayr

Authors
  1. M. Grasserbauer
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  2. G. Stingeder
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  3. P. Wilhartitz
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  4. M. Schreiner
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  5. U. Traxlmayr
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Grasserbauer, M., Stingeder, G., Wilhartitz, P. et al. Progress in materials analysis with SIMS: Quantitative surface and interface characterization. Mikrochim Acta 84, 317–348 (1984). https://doi.org/10.1007/BF01197147

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  • DOI: https://doi.org/10.1007/BF01197147

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