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Microchemical analysis of thin films by elastic scattering of3He

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Summary

An instrument has been developed and tested for the microchemical analysis of thin films by elastic scattering of3He through large angles. Various spectra from different films on different substrates are presented. They can be used to detect the presence of different elements in the films or on their surface and to determine their relative quantities.

Zusammenfassung

Ein Gerät zur Mikroanalyse dünner Filme durch Besprühen mit3He unter großem Einfallswinkel wurde entwickelt und geprüft. Diverse Spektren verschiedener Filme auf unterschiedlichen Substraten wurden beschrieben. Sie lassen sich zum Nachweis verschiedener Elemente in solchen Filmen bzw. auf deren Oberfläche sowie zu deren Bestimmung verwenden.

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Authors and Affiliations

  1. Joint Institute for Nuclear Research, Dubna, USSR

    J. Buch & N. I. Balalikin

Authors
  1. J. Buch
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  2. N. I. Balalikin
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Buch, J., Balalikin, N.I. Microchemical analysis of thin films by elastic scattering of3He. Mikrochim Acta 69, 19–25 (1978). https://doi.org/10.1007/BF01196977

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  • DOI: https://doi.org/10.1007/BF01196977

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