Abstract
Fine AIN powder was synthesized by the vapour-phase reaction of AICl3 and NH3 at 600 to 1100° C, and the particulate characteristics and the deposition features were investigated. The powder deposited near the AlCl3-feeding nozzle included radially-grown particles with columnar crystals. The powder deposited apart from the AlCl3-feeding nozzle consisted of only fine, spherical particles. Vapour-phase reaction at 1100° C produced fine powder, which was characterized by uniform and fine particle size; its distribution width was from 0.1 to 0.3μm, and median diameter was 0.18μm. Deposition area of the powder was affected by the reaction temperature and the temperature profile in the reactor.
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Kimura, I., Hotta, N., Nukui, H. et al. Particulate characteristics and deposition features of fine AIN powder synthesized by vapour-phase reaction. J Mater Sci 24, 4076–4079 (1989). https://doi.org/10.1007/BF01168977
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DOI: https://doi.org/10.1007/BF01168977