Oxygen distribution in silicon nitride powders

Abstract

The oxygen content of ten different silicon nitride powders was determined by bulk chemical analysis and surface-sensitive X-ray photoemission spectroscopy (XPS). In silicon nitride powders prepared from silicon and silica by nitridation and carbothermal reduction in a nitrogen atmosphere, respectively, only a minor part of the total oxygen content of 0.9 to 2.5 wt% was found in a surface layer of less than 1 nm thick, whereas an appreciable amount can be attributed to oxygen dissolved in the bulk. Powders made by silicon diimide decomposition, however, are characterized by a higher oxygen concentration at the particle surface relative to the bulk, which may be further reduced by chemical treatment. The surface layer composition corresponds to an intermediate state between silica and silicon oxynitride.