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Structural properties of non-stoichiometric zinc oxide films

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Abstract

We report a study of the crystal structure and microstructure of sputtered non-stoichiometric ZnO x thin films for which 0.7 < x < 1. A substrate r.f. discharge was used to control film stoichiometry during deposition. All films had a columnar microstructure, and the film surface progressed from rough to smooth with increased oxidation. X-ray diffraction analysis detected no presence of crystalline zinc in any film. The crystallite size, strain and orientation of ZnO, detected in all films, was dependent on film composition and substrate r.f. discharge power. A model of film structure incorporating the competing effects of ion bombardment (causing amorphization) and increased oxygen content (creating improved crystallinity and orientation) is used to explain the observed variation of ZnO x crystal structure.

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References

  1. K. L. Chopra, S. Major andD. K. Pandya,Thin Solid Films 102 (1983) 1.

    Google Scholar 

  2. M. J. Brett, R. W. McMahon, J. Affinito andR. R. Parsons,J. Vac. Sci. Technol. Al (1983) 352.

    Google Scholar 

  3. D. J. Leary, J. O. Barnes andA. G. Jordan,J. Electrochem. Soc. 129 (1982) 1382.

    Google Scholar 

  4. T. Mitsuyu, O. Yamazaki, K. Ohji andK. Wash,Ferroelectrics 42 (1982) 233.

    Google Scholar 

  5. M. J. Brett andR. R. Parsons,J. Vac. Sci. Technot. A4 (1986) 423.

    Google Scholar 

  6. Idem, Can. J. Phys. 63 (1985) 819.

    Google Scholar 

  7. S. Maniv, W. Westwood andE. Columbini,J. Vac. Sci. Technol. 20 (1982) 162.

    Google Scholar 

  8. C. Gawlak andC. Aita,ibid. A1 (1983) 415.

    Google Scholar 

  9. E. Kay,ibid. A4 (1986) 462.

    Google Scholar 

  10. F. Sarrot, Z. Iqbal andS. Veprek,Solid State Commun. 42 (1982) 465.

    Google Scholar 

  11. J. Affinito, N. Fortier andR. R. Parsons,J. Vac. Sci. Technol. A2 (1984) 316.

    Google Scholar 

  12. B. Cullity, “Elements of X-ray Diffraction” Addison-Wesley, London, 1959) p. 99.

    Google Scholar 

  13. A. F. Hebard andS. Nakahara,Appl. Phys. Lett. 41 (1982) 1130.

    Google Scholar 

  14. S. Nakahara andA. F. Hebard,Thin Solid Films 102 (1983) 345.

    Google Scholar 

  15. J. A. Thornton,ibid. 40 (1977) 335.

    Google Scholar 

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Authors and Affiliations

  1. Department of Electrical Engineering, The University of Alberta, T6G 2G7, Edmonton, Alberta, Canada

    M. J. Brett

  2. Department of Physics, The University of British Columbia, V6T 1 W5, Vancouver, Canada

    R. R. Parsons

Authors
  1. M. J. Brett
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  2. R. R. Parsons
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Brett, M.J., Parsons, R.R. Structural properties of non-stoichiometric zinc oxide films. J Mater Sci 22, 3611–3614 (1987). https://doi.org/10.1007/BF01161468

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  • DOI: https://doi.org/10.1007/BF01161468

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