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Reactions at the Al/SiO2/SiC layered interface

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Abstract

Electron spectroscopy and thermodynamic modelling have been used to examine reactions at the Al/SiO2/SiC layered interfaces at 800 °C. The reactions have been examined as a function of oxide thickness. Three regimes have been isolated: (i) where there is no oxide present aluminium and SiC react to produce Al4C3 and free silicon; (ii) where there is a thin oxide present the initial products are aluminosilicates and amorphous alumina; however, once the SiO2 is consumed, Al4C3 emerges as a product; (iii) where a thick oxide is present only aluminosilicate and alumina are formed.

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References

  1. E. Pettenpaul, W. Von Munch andG. Ziegler,Inst. Phys. Conf. Ser. 53 (1980) 21.

    Google Scholar 

  2. M. L. Torti, R. A. Alliegro, D. W. Richerson, M. C. Washburn andG. Q. Weaver,Proc. Brit. Ceram. Soc. 22 (1973) 129.

    Google Scholar 

  3. C. Van Opdorp,Solid State Electron. 14 (1971) 613.

    Google Scholar 

  4. W. V. Munch, W. Kurzinger andI. Pfaffeneder,ibid. 19 (1976) 871.

    Google Scholar 

  5. A. Suzuki, H. Ashida, N. Furui, K. Mameno andH. Matsunami,Jpn J. Appl. Phys. 21 (1982) 579.

    Google Scholar 

  6. E. Gugel, in “Engineering Applications of Ceramic Materials”, edited by M. M. Schwartz (American Society for Metals, Metals Park, Ohio, 1985) pp. 117–125.

    Google Scholar 

  7. S. Towata andS. Yamada,J. Jpn Inst. Metals 47 (1983) 159.

    Google Scholar 

  8. S. J. Barclay, J. R. Fox andH. K. Bowen,J. Mater. Sci. 22 (1987) 4403.

    Google Scholar 

  9. J. A. Cornie, R. S. Suplinskas andA. W. Hauze,Ceram. Engng Sci. Proc. 1 (1980) 728.

    Google Scholar 

  10. S. R. Nutt andF. E. Wawmer,J. Mater. Sci. 20 (1985) 1953.

    Google Scholar 

  11. T. N. Taylor andD. S. Phillips,J. Vac. Sci. Technol. A6 (1988) 982.

    Google Scholar 

  12. M. N. Rahaman andL. C. De Jonghe,Am. Ceram. Soc. Bull. 66 (1987) 782.

    Google Scholar 

  13. W. C. Harrigan,Metall. Trans. 9A (1978) 503.

    Google Scholar 

  14. R. J. Arsenault andC. S. Pande,Scripta Metall. 18 (1984) 1131.

    Google Scholar 

  15. V. M. Bermundez,Appl. Phys. Lett. 42 (1983) 70.

    Google Scholar 

  16. L. Porte,J. Appl. Phys. 60 (1986) 635.

    Google Scholar 

  17. T. Iseki, T. Kameda andT. Maruyama,J. Mater. Sci. 19 (1984) 1692.

    Google Scholar 

  18. A. I. Akinwande andJ. D. Plummer,J. Electrochem. Soc. 134 (1987) 2297.

    Google Scholar 

  19. P. T. B. Shaffer,Acta Crystallogr. B25 (1969) 477.

    Google Scholar 

  20. B. E. Deal andA. S. Grove,J. Appl. Phys. 36 (1965) 3770.

    Google Scholar 

  21. C. D. Wagner andJ. A. Taylor,J. Electron. Spectrosc. Relat. Phenom. 20 (1980) 83.

    Google Scholar 

  22. J. H. Scofield,ibid. 8 (1976) 129.

    Google Scholar 

  23. A. E. Hughes andB. A. Sexton,ibid. 46 (1988) 31.

    Google Scholar 

  24. A. Savitzky andM. J. E. Golay,Anal. Chem. 36 (1964) 1627.

    Google Scholar 

  25. J. Steiner, Y. Termonia andJ. Deltour,ibid. 44 (1972) 190.

    Google Scholar 

  26. A. Procter andP. M. A. Sherwood,Anal. Chem. 54 (1982) 13.

    Google Scholar 

  27. L. Nyborg, A. Nylund andI. Olefjord,SIA Surf. Interface Anal. 12 (1988) 110.

    Google Scholar 

  28. S. Tanuma, C. J. Powell andD. R. Penn,Surf. Sci. 192 (1987) L849.

    Google Scholar 

  29. A. G. Turnbull andM. W. Wadsley, The Australian Institute of Mining and Metallurgy Symposium on Extractive Metallurgy, Melbourne (1984) p. 78.

  30. J. Hedman, Y. Baer, A. Berndtsson, M. Klasson, G. Leonhardt, R. Nilsson andC. Nordling,J. Electron. Spectrosc. Relat. Phenom. 1 (1972/73) 101.

    Google Scholar 

  31. Y. Tajima, K. Kijima andW. D. Kingery,J. Chem. Phys. 77 (1982) 2592.

    Google Scholar 

  32. J. Derrien andF. Ringeisen,Solid Stale Commun. 50 (1984) 627.

    Google Scholar 

  33. H. Hoechst andM. Tang,J. Vac. Sci. Technol. A5 (1987) 1640.

    Google Scholar 

  34. R. W. Kee, K. M. Geib, C. W. Wilmsen andD. K. Ferry,ibid. 15 (1978) 1520.

    Google Scholar 

  35. T. W. Hickmott,J. Appl. Phys. 51 (1980) 4269.

    Google Scholar 

  36. C. D. Wagner, D. E. Passoja, H. F. Hillery, T. G. Kinisky, H. A. Six, W. T. Jansen andJ. A. Taylor,J. Vac. Sci. Technol. 21 (1982) 933.

    Google Scholar 

  37. Y. Mizokawa, K. M. Geib andC. W. Wilmsen,ibid. A4 (1986) 1696.

    Google Scholar 

  38. L. Porte andA. Sartre,J. Mater. Sci. 24 (1989) 271.

    Google Scholar 

  39. J. Jorgensen, M. E. Wadsworth andI. B. Castler,J. Amer. Ceram. Soc. 42 (1959) 613.

    Google Scholar 

  40. Y. N. Sun, A. Feldman andE. N. Farabaugh,Thin Solid Films 157 (1988) 351.

    Google Scholar 

  41. M. Del Giudice, J. J. Joyce andJ. H. Weaver,Phys. Rev. B. 36 (1987) 4761.

    Google Scholar 

  42. L. J. Brillson, A. D. Katnani, M. Kelly andG. Margaritondo,J. Vac. Sci. Technol. A2 (1984) 551.

    Google Scholar 

  43. R. Bicker, H. Deger, W. Herzog, K. Rieser, H. Plum, G. Hohlneicher andH. J. Freund,J. Catal. 94 (1985) 69.

    Google Scholar 

  44. A. S. Isaikin, V. M. Chubarov, B. F. Trefilov, V. A. Silaev andYu. A. Gorelov,Met. Sci. Heat Treatment (translated fromMetall. Termich. Obrabotka Metallov)22 (1980) 815.

    Google Scholar 

  45. A. E. Gershinskii, A. A. Khoromenko andF. L. Edelman,Phys. Status Solidi (a) 25 (1974) 645.

    Google Scholar 

  46. K. Prabriputaloong andM. R. Piggott,J. Electrochem. 121 (1974) 430.

    Google Scholar 

  47. A. H. Carim andA. Bhattacharyya,Appl. Phys. Lett. 46 (1985) 872.

    Google Scholar 

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Hughes, A.E., Hedges, M.M. & Sexton, B.A. Reactions at the Al/SiO2/SiC layered interface. J Mater Sci 25, 4856–4865 (1990). https://doi.org/10.1007/BF01129953

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