Abstract
The accuracy of a laser diffraction technique has been improved for small fibre diameter measurement by a calibration with SEM-measured internal standards. The calibration showed that the laser diameter is about 5% larger than the corresponding SEM diameter. After correction for systematic error via accurate calibration, the laser technique was found to be fast and capable of attaining a diameter measurement accuracy of 0.1μm.
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Li, CT., Tietz, J.V. Improved accuracy of the laser diffraction technique for diameter measurement of small fibres. J Mater Sci 25, 4694–4698 (1990). https://doi.org/10.1007/BF01129926
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DOI: https://doi.org/10.1007/BF01129926