Abstract
SiC-C nano-composites covering every possible combination of carbon and SiC were prepared by chemical vapour deposition. The specific compositions of the deposits were controlled by changing the Si/C molar ratio in the source gases at deposition temperatures (T dep) of 1673 to 1873 K and total gas pressures (P tot) of 6.7 to 40 k Pa using the SiCl4-C3H8-H2 system. The prediction, based on the thermodynamic calculation on composition, morphology and deposition rate, was compared with experimental results. The optimal deposition conditions predicted by the calculations were nearly in agreement with the experimental results.
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T. Hirai, M. Sasaki andM. Niino,J. Soc. Mater. Sci. Jpn 36 (1987) 1205.
M. Niino, T. Hirai andR. Watanabe,J. Jpn Soc. Compos. Mater. 13 (1987) 257.
M. Sasaki et al., J. Ceram. Soc. Jpn 97 (1989) 539.
T. Hirai, “Emergent Process Methods for High Technology Ceramics”, Materials Science Research Series, Vol. 17, edited by R. F. Davis, H. Palmour III and R. L. Porter (Plenum, New York, 1984) p. 329.
T. Hirai andT. Goto, in “Tailoring Multiphase and Composite Ceramics”, edited by R. E. Tressler, G. L. Messing, C. G. Pantano and R. E. Newnham (Plenum, New York, 1986) p. 165.
S. Yajima andT. Hirai,J. Mater. Sci. 4 (1969) 416.
S. Marinković et al., Carbon 8 (1970) 283.
S. Yajima andT. Hirai,J. Mater. Sci. 4 (1969) 424.
M. Sasagawa et al., in Proceedings of the 95th Meeting of Japan Institute of Metals, Hiroshima, 1984 (Japan Institute of Metals, 1984) p. 149.
J. L. Kaae andT. D. Gulden,J. Amer. Ceram. Soc. 54 (1971) 605.
T. Hirai, T. Goto andT. Kaji,Yogyo-Kyokai-Shi 91 (1983) 502.
J. J. Nickl andC. V. Braunmühl,J. Less-Common Metals 25 (1971) 303.
V. M. Bonnke andE. Fitzer,Ber. Dtsch. Keram. Ges. 43 (H2) (1966) 180.
T. M. Besmann, ORNL/TM-5775 (April, 1977).
“JANAF Thermochemical Tables” 2nd Ed, number NSRDS- NBS-37, edited by D. R. Stull and H. Prophet (US Government Printing Office, Washington, DC, 1971).
T. Hirai,Bull. Jpn Inst. Metals 11 (1972) 577.
C. S. Park, J. G. Kim andJ. S. Chun,J. Electrochem. Soc. 130 (1983) 1607.
D. G. Kim, J. S. Yoo andJ. S. Chun,J. Vac. Sci. Technol. A4 (1986) 219.
J. M. Blocher Jr,ibid. 11 (1974) 680.
M. Mukaida, T. Goto andT. Hirai,J. Mater. Sci. 25 (1990) 1069.
C. Jiang, T. Goto andT. Hirai,ibid. 25 (1990) 1086.
S. Motojima et al., ibid. 21 (1986) 1363.
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Wang, Y., Sasaki, M., Goto, T. et al. Thermodynamics for the preparation of SiC-C nano-composites by chemical vapour deposition. J Mater Sci 25, 4607–4613 (1990). https://doi.org/10.1007/BF01129914
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DOI: https://doi.org/10.1007/BF01129914