Soviet Atomic Energy

, Volume 52, Issue 5, pp 324–326 | Cite as

Application of the method of resonance nuclear reactions to ascertain the spatial distribution of implanted aluminum in gallium arsenide

  • J. A. Davies
  • I. S. Tashlykov
  • L. M. Howe


Aluminum Spatial Distribution Gallium Nuclear Reaction Arsenide 
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Literature Cited

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    H. Andersen and J. Ziegler, The Stopping and Ranges of Ions in Matter, Vol. 3, Pergamon Press, New York (1977).Google Scholar

Copyright information

© Plenum Publishing Corporation 1982

Authors and Affiliations

  • J. A. Davies
  • I. S. Tashlykov
  • L. M. Howe

There are no affiliations available

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