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Soviet Atomic Energy

, Volume 52, Issue 5, pp 324–326 | Cite as

Application of the method of resonance nuclear reactions to ascertain the spatial distribution of implanted aluminum in gallium arsenide

  • J. A. Davies
  • I. S. Tashlykov
  • L. M. Howe
Letters
  • 14 Downloads

Keywords

Aluminum Spatial Distribution Gallium Nuclear Reaction Arsenide 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Literature Cited

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    J. Gyulai, T. Lohner, and E. Pastor, in: Proceedings, Conference on Ion Beam Modification of Materials, KFKI sokszorsito üzeme, Budapest (1979), p. 1177.Google Scholar
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    I. I. Novak et al., Fiz. Tverd. Tela (Leningrad)20, 2134 (1978).Google Scholar
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    I. S. Tashlykov, in: Interaction of Charged Particles with a Solid. Part 2 [in Russian], Minsk. Radiotekh. Inst., Minsk (1978), p. 125.Google Scholar
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    A. F. Burenkov et al., Tables of Spatial Distribution Parameters of Ion-Implanted Impurities [in Russian], Belorus. Gos. Univ., Minsk (1980).Google Scholar
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    H. Andersen and J. Ziegler, The Stopping and Ranges of Ions in Matter, Vol. 3, Pergamon Press, New York (1977).Google Scholar

Copyright information

© Plenum Publishing Corporation 1982

Authors and Affiliations

  • J. A. Davies
  • I. S. Tashlykov
  • L. M. Howe

There are no affiliations available

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