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A radiation process in semiconductor-device fabrication

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Literature Cited

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Authors
  1. A. S. Shtan'
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  2. B. M. Terent'ev
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  3. N. G. Kon'kov
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Additional information

Translated from Atomnaya Énergiya, Vol. 65, No. 6, pp. 405–410, December, 1988.

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Shtan', A.S., Terent'ev, B.M. & Kon'kov, N.G. A radiation process in semiconductor-device fabrication. At Energy 65, 980–986 (1988). https://doi.org/10.1007/BF01122469

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  • DOI: https://doi.org/10.1007/BF01122469

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