Abstract
A uniform TiN film was coated on to the inner walls of long steel tubes by moving a chemical vapour deposition furnace along the tubes. The moving direction of the furnace from outlet side to inlet side gave a more homogeneous coating than the reverse moving direction. The TiN-coated steel tube (inside diameter 10 mm) was obtained under the following conditions; peak deposition temperature 1050° C, total flow rate of reactant gas (TiCl4 + N2 + H2) ∼ 6.0 ml sec−1, moving velocity of the furnace 2.8 mm min−1. The inner wall of the coated tube showed high corrosion resistance for dipping in 6N HCI aqueous solution for 17 h.
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References
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H. Itoh, M. Gonda andK. Sugiyama,Kinzoku Hyomen Gijutsu 35 (1984) 590.
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Itoh, H., Kato, K. & Sugiyama, K. Chemical vapour deposition of corrosion-resistant TiN film to the inner walls of long steel tubes. J Mater Sci 21, 751–756 (1986). https://doi.org/10.1007/BF01117349
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DOI: https://doi.org/10.1007/BF01117349