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Polyimide-silica microcomposite films

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Abstract

Planarizing films of fine-grained silica embedded in polyimide have been prepared by a spincoating technique and their structure has been investigated by optical and electron microscopy. The films were found to be diphasic. A silica content near 9 vol% yields a well mixed silica/polyimide composite which is homogeneous down to nanometre scale and has good planarization characteristics. Films with contents of 3 and 6 vol% silica have rough surfaces and exhibit two forms of segregation. In the 3% case, elongated inclusions of such silica/polyimide material appear at ∼ 100-μm islands in a pure polyimide matrix. In the 6% case, the pure polyimide appears as ∼ 100-μm elongated lakes surrounded by silica/polyimide material.

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Authors and Affiliations

  1. Center for Dielectric Studies, Materials Research Laboratory, Pennsylvania State University, 16802, University Park, PA, USA

    E. Breval, M. L. Mulvihill, J. P. Dougherty & R. E. Newnham

Authors
  1. E. Breval
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  2. M. L. Mulvihill
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  3. J. P. Dougherty
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  4. R. E. Newnham
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Breval, E., Mulvihill, M.L., Dougherty, J.P. et al. Polyimide-silica microcomposite films. J Mater Sci 27, 3297–3300 (1992). https://doi.org/10.1007/BF01116027

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  • DOI: https://doi.org/10.1007/BF01116027

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